Novel Capacitive Accelerometers with Beams based on Modified Compliant Crank-Slider Amplifiers
DOI:
https://doi.org/10.30973/progmat/2019.11.2/6Keywords:
MEMS, acceleration, ANSYS, performance parameters, simulationAbstract
Accelerometers measure the accelerations or vibrations experienced by objects due to inertial forces or mechanical excitations. The Microelectromechanical (MEM) Accelerometers have various applications, among others, in the industries, aeronautics, automotive, oil, construction, manufacturing of computer equipment and consumer electronics. These devices employ different techniques for their operation. The interest in this work focuses on capacitive accelerometers, seeking to improve their displacement sensitivity. In order to improve this parameter, it has generally been used: proof mass reduction, modification of the suspension beams, or, alternatively, by adding displacement amplifiers. In this work, after analyzing several configurations, two designs of beams based on Modified Compliant Crank-Slider Amplifiers are proposed. The improvement in displacement sensitivity, compared with that obtained with uniform beams, is in one case of 72.435% and in the other, of 125%. Simulations were performed with ANSYS.
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