Novedosos Acelerómetros Capacitivos con Brazos Basados en Amplificadores Flexibles de Manivela Deslizante Modificados

Autores/as

  • Pedro Vergas-Chable Instituto de Investigación en Ciencias Básicas y Aplicadas-Centro de Investigación en Ingeniería y Ciencias Aplicadas, (IICBA-CIICAp) de la Universidad Autónoma del Estado de Morelos (UAEM), 62209, Av. Universidad No. 1001, Col. Chamilpa, Cuernavaca, Mor., México
  • Margarita Tecpoyotl-Torres Instituto de Investigación en Ciencias Básicas y Aplicadas-Centro de Investigación en Ingeniería y Ciencias Aplicadas, (IICBA-CIICAp) de la Universidad Autónoma del Estado de Morelos (UAEM), 62209, Av. Universidad No. 1001, Col. Chamilpa, Cuernavaca, Mor., México
  • Ramón Cabello-Ruiz Universidad Tecnológica Emiliano Zapata del Estado de Morelos (UTEZ), Av. Universidad Tecnológica No. 1. Col. Palo Escrito. C.P. 6270
  • Alfonso Aldair Colin-Antunez Universidad Tecnológica Emiliano Zapata del Estado de Morelos (UTEZ), Av. Universidad Tecnológica No. 1. Col. Palo Escrito. C.P. 6270
  • Rafael Vergas-Bernal Instituto Tecnológico Superior de Irapuato (ITESI). Carretera Irapuato - Silao km 12.5, colonia El Copal. Irapuato, Guanajuato, México

DOI:

https://doi.org/10.30973/progmat/2019.11.2/6

Palabras clave:

MEMS, aceleración, ANSYS, parámetros de operación, simulación

Resumen

Los acelerómetros miden las aceleraciones o vibraciones, que experimentan los objetos debido a fuerzas inerciales o excitaciones mecánicas. Los acelerómetros Microelectromecánicos (MEM) tienen diversas aplicaciones en las industrias, aeronáutica, automotriz, petrolera, construcción, manufacturera de equipos de cómputo y electrónica de consumo, entre otras. Estos dispositivos emplean diferentes técnicas para su funcionamiento. El interés en este trabajo, se enfoca en los acelerómetros capacitivos, buscando mejorar su sensibilidad de desplazamiento. Para mejorar este parámetro se ha recurrido generalmente, a la reducción de masa, a la modificación de los brazos de suspensión, o bien, agregando amplificadores de desplazamiento. En este trabajo, después de analizar varias configuraciones, se proponen dos diseños de brazos modificados basados en amplificadores flexibles de manivela deslizante modificados. La mejora en la sensibilidad de desplazamiento, comparada con la obtenida con brazos uniformes, es en uno de los casos, de 72.435% y en el otro de 125%. Los resultados fueron obtenidos usando ANSYS.

Biografía del autor/a

Pedro Vergas-Chable, Instituto de Investigación en Ciencias Básicas y Aplicadas-Centro de Investigación en Ingeniería y Ciencias Aplicadas, (IICBA-CIICAp) de la Universidad Autónoma del Estado de Morelos (UAEM), 62209, Av. Universidad No. 1001, Col. Chamilpa, Cuernavaca, Mor., México

Pedro Vargas Chablé received the Electrical and Electronic Engineer degree from the Juarez Autonomous University of Tabasco, México (2009). He worked in Environment technology SA of CV (2009- 2012), he studied lighting (NOM-025-STPS-2008) and Non-Ionizing Radiation (NOM-013-STPS-1993). He received the M.Sc degree from Center for Applied Research in Engineering and Applied Sciences (CIICAp-UAEM) in 2004. Currently, he is studying a PhD in Engineering and Applied Sciences. He works as professor at CIICAp and at the School of Chemical Sciences and Engineering, also of UAEM. His research interests include MEMS (microgripper, Chevrón actuator, and accelerometers), VLSI and FEA

Margarita Tecpoyotl-Torres, Instituto de Investigación en Ciencias Básicas y Aplicadas-Centro de Investigación en Ingeniería y Ciencias Aplicadas, (IICBA-CIICAp) de la Universidad Autónoma del Estado de Morelos (UAEM), 62209, Av. Universidad No. 1001, Col. Chamilpa, Cuernavaca, Mor., México

Margarita Tecpoyotl Torres received the Mathematician degree from the University of Puebla, Mexico (1991). She was also graduated as Electronic Engineer (1993). She received the M.Sc. and Ph.D. degrees in Electronics from National Institute of Astrophysics, Optics and Electronics, INAOE, México (1997 and 1999, respectively). Dr. Tecpoyotl works, since 1999, at Autonomous University of Morelos, Mexico, where she is currently titular professor. She has been visiting research scientist at University of Bristol (2001), UK. She led the Winner team of Boot Camp, UAEM Potential obtaining support to participate in Full Immersion Program, USA (2014). She was co-founder of INNTECVER (2014). She won the 3rd place in the Royal Academy of Engineering´s Leaders in Innovation Fellowships final pitch session, in UK (2015). Her main research interest includes MEMS, Antenna design, Microwave devices, entrepreneurship, innovation; and development of educational programs. She holds the status of National Researcher (SNI), in Mexico since 1999.

Ramón Cabello-Ruiz, Universidad Tecnológica Emiliano Zapata del Estado de Morelos (UTEZ), Av. Universidad Tecnológica No. 1. Col. Palo Escrito. C.P. 6270

Ramon Cabello Ruiz received the degree of Mechanical Engineer, in 2010 from the Autonomous University of the State of Morelos (UAEM), Mexico. He got his Master degree with honors in CIICAp, UAEM and he obtained the Ph. D. from the Center for Applied Research in Engineering and Applied Sciences (CIICAp), Mexico, in 2017. He was part of the winner team of the BootCamp 2013 organized by TechBA. He worked as teacher at the School of Chemical Sciences and Engineering at UAEM. Ramon Cabello teachs at the Universidad Tecnologica Emiliano Zapata, and Universidad Politecnica del Estado de Morelos

Alfonso Aldair Colin-Antunez, Universidad Tecnológica Emiliano Zapata del Estado de Morelos (UTEZ), Av. Universidad Tecnológica No. 1. Col. Palo Escrito. C.P. 6270

Alfonso Aldair ColinAntunez began his studies in Mechatronics Engineering at Emiliano Zapata Technological University (UTEZ) in 2016. Currently, he studies the 7th semester. He obtained the degree of Superior Technician in Automation Area Mechatronics and the TOEFL ITP certification by the Emiliano Zapata Technological University (UTEZ) in 2018.

Rafael Vergas-Bernal, Instituto Tecnológico Superior de Irapuato (ITESI). Carretera Irapuato - Silao km 12.5, colonia El Copal. Irapuato, Guanajuato, México

Rafael Vargas Bernal was born in Irapuato, Guanajuato, Mexico, in 1972. He received the degree of Communications and Electronics Engineer from the University of Guanajuato in 1995. He received the M.Sc. and PhD. in Electronics from National Institute of Astrophysics, Optics and Electronics, INAOE, México (1997 and 2000, respectively). Dr. Vargas works, since 2002, at Higher Technological Institute of Iapuato, México, where he is currently Research Professor. He is author of 19 chapters in books and 8 articles in international journals. His research interests include MEMS, nanomaterials, twodimensional materials, aerospace materials, sensors, and composite materials. He is a journal reviewer: Nanoscale, RSC Advances, Sensors and Actuators B: Chemistry, Materials Science and Engineering B, and IEEE Sensors Journal. He is member of the Network of Nanosciences and Nanotechnology (CONACYT). He has 143 citations, h index of 7 and an i-10 index of 5. National Investigator Level I (SNI-1) until 2022.

Citas

Colin Tse. Design of a Power Scalable Capacitive MEMS Accelerometer Front End. Master Thesis. Department of Electrical and Computer Engineering University of Toronto. 2013.

Y. Vinay Kumar, P. Srinivasulu, Y. Greeshma, A. M. Vamsi Krishna, Shaffyvullah Md. Design and Simulation of Mems Capacitive Accelerometer. IJECT. 2011, 2, SP-1, 233-236. ISSN: 2230-7109(Online). ISSN: 2230-9543(Print).

Matej Andrejašic. Seminar MEMS accelerometers. 2008. University of Ljubljana. Faculty for mathematics and physics. Department of physics. Retrieved 26th, October, 2018, de http://mafija.fmf.unilj.si/seminar/files/2007_2008/MEMS_accelerometers-koncna.pdf, 2008.

Jia Yu Chen. Single- and dual-axis lateral capacitive accelerometers based on CMOS-MEMS technology. Master thesis. University of Oslo. April 30, 2010

Jérôme Laine and Denis Mougenot. A highsensitivity MEMS-based accelerometer. The Leading Edge, 2014, 33(11), 1234-1242. https://doi.org/10.1190/tle33111234.1

A. Albarbar and S.H. Teay. Chapter 2. MEMS Accelerometers: Testing and Practical Approach for Smart Sensing and Machinery Diagnostics. Springer International Publishing Switzerland 2017. D. Zhang, B. Wei (eds.), Advanced Mechatronics and MEMS Devices II, Microsystems and Nanosystems. Available from: https://doi.org/10.1007/978-3-319-32180-6_2.

Ramon Cabello-Ruiz, Margarita TecpoyotlTorres, Alfonso Torres-Jacome, Volodymyr Grimalsky, Jose Gerardo Vera-Dimas, Pedro Vargas-Chable. A Novel Displacement-amplifying Compliant Mechanism Implemented on a Modified Capacitive Accelerometer. International Journal of Electrical and Computer Engineering (IJECE). 2017, 7(4), 1858-1866. ISSN: 2088-8708. Available from: https://doi.org/10.11591/ijece.v7i4.pp1858-1866

Sambuddha, K., & Ananthasuresh G. K., “Improving the Sensitivity and Bandwidth of In-Plane Capacitive Microaccelerometers Using Compliant Mechanical Amplifiers”. Journal of Microelectromechanical Systems. 2014, 23(4), 871 – 887. https://doi.org/10.1109/JMEMS.2014.2300231

Robert Puers. Capacitive sensors: When and how to use them. Sensors and Actuators A: Physical. 1993, 37 and 38, 93-105. Available from: https://doi.org/10.1016/0924-4247(93)80019-D

Abdellatef E. O. Badri. Performance Improvement of MEMS Accelerometers in Vibration Based Diagnosis. Ph. D. Thesis. University of Manchester, School of Mechanical, Aerospace and Civil Engineering. 2011.

Mourad Benmessaoud and Mekkakia Maaza Nasreddine. Optimization of MEMS capacitive accelerometer. Springerlink. Microsyst Technol. 2013, 19, 713–720. Available from: https://doi.org/10.1007/s00542-013-1741.

Jianbing X., Meng S. & Weizheng Y., “A high sensitivity micromachined accelerometer with an enhanced inertial mass SOI MEMS process”. The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China. 2013, 336-339. Available from: https://doi.org/10.1109/NEMS.2013.6559745.

Sijie Yang and Qingsong Xu: A review on actuation and sensing techniques for MEMS-based microgrippers. J Micro-Bio Robot. 2017, 3, 1–14. Available from: https://doi.org/10.1007/s12213-017-0098-2.

Yukun J., Minping J., and Oingsong X: A DualAxis Electrostatically Driven MEMS Microgripper. International Journal of Advanced Robotic Systems. 2014, 11:187. Available from: https://doi.org/10.5772/59677

Jui-Chang K., Hen-Wei H., Shu-Wei T., and Yao-Joe Y: A hydrogel-based intravascular microgripper manipulated using magnetic fields. Sensors and Actuators A. 2014, 211, 121–130. Available form: https://doi.org/10.1016/j.sna.2014.02.028.

Larry L. Howell, Spencer P. Magleby, Brian M. Olsen. Handbook of Compliant Mechanisms. Wiley. 2013.

Margarita Tecpoyotl Torres, Pedro Vargas Chablé, Ramón Cabello-Ruíz y M. A. Flores González. Actuador chevrón MEM con reguladores de movimiento. Revista electrónica Programación Matemática y Software. 2015, 7 (3), 64-71. ISSN: 2007-3283. https://doi.org/10.30973/progmat/2015.7.3/8

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Publicado

28-06-2019

Cómo citar

Vergas-Chable, P., Tecpoyotl-Torres, M., Cabello-Ruiz, R., Colin-Antunez, A. A., & Vergas-Bernal, R. (2019). Novedosos Acelerómetros Capacitivos con Brazos Basados en Amplificadores Flexibles de Manivela Deslizante Modificados. Programación matemática Y Software, 11(2), 45–56. https://doi.org/10.30973/progmat/2019.11.2/6

Número

Vol. 11 Núm. 2 (2019): Junio de 2019

Sección

Artículos

Licencia

Derechos de autor 2019 Programación Matemática y Software

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